Radio-frequency microelectromechanical system - Wikipedia
ADI reveals next generation for MEMS switches for test
Towards improved reliability of RF-MEMS: mechanical aspects and experimental testing of a micro-switch design with embedded active self-recovery mechanism to counteract stiction | Microsystem Technologies
Research - RF MEMS switch
Schematic of RF MEMS Switch with HF02 | Download Scientific Diagram
RF MEMS Switch Fabrication and Packaging | IntechOpen